Thin Film Deposition Control System


Accel and Kurt J. Lesker Company have exclusively partnered to design and develop a software architecture for recipe-driven multi-chamber Thin Film Deposition (TFD) and other vacuum control system.

The software models in the architecture can be configured to suit a wide variety of process requirements and address monitoring and control of standard assemblies commonly found in TFD systems.

The TFD software architecture is general and can be easily reapplied to similar system requirements.

Customer Profile

Accel created the TFD architecture and models to overcome the client's dissatisfaction with the unpredictable costs associated with developing and maintaining deposition systems. Systems of this complexity are characterized by long system lead times resulting from:

Architectural Benefits

Chamber-Based Operational Capabilities

TFD applications have several different screens, common to each processing chamber.

Automated Processes

The following processes execute on each chamber's computer to support compilation and execution of process recipes, and to service low-level devices and alarms.

Setup

The following user interface screens enable the user to define power supply and target inventories, assign power supplies and targets to chamber locations, specify operational calibrations, and define micro recipes to control low-level processes.

Maintenance

The following user interface screens are used to monitor and set the chamber vacuum state, gas flow characteristics, and deposition parameters. The graphical interfaces use icons and colors to provide a "quick-look" perspective into the state of the chamber. The point-and-click interface provides simple control of the components.

Workcell-Based Operational Capabilities

Automated Processes

The following processes execute on the workcell (WC) computer to provide scheduling, compilation, and execution of workcell recipes, and the sharing of inter-chamber data.

Setup

The following user interface screens enable the user to manage substrate inventories, review workcell execution history, compose workcell recipes, and maintain user accounts.

Maintenance

The following user interface screens are used to monitor and set the workcell's vacuum state, and monitor workcell recipe execution. The graphical interface uses icons and colors to provide a "quick-look" perspective into the state of the workcell.

Additional Features

The following are a summary of the additional features:

System Requirements

Workcell Computer

Chamber Computer(s)

MS-DOS and Windows are products of Microsoft Corp.
Progress is a product of Progress Software Corp.
Think&Do is a product of Entivity Inc.


last updated June 18, 2003